Includes bibliographical references and index.
|Statement||Hywel Morgan and Nicolas G. Green.|
|Series||Microtechnologies and microsystems series -- 2.|
|Contributions||Green, Nicolas G., 1972-|
|LC Classifications||TA418.78 .M67 2001|
|The Physical Object|
|Pagination||xvi, 324 p. :|
|Number of Pages||324|
|LC Control Number||2001031870|
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